@misc{indiciaeb727d1250905,
  title = {Calculations of pathways of precise P incorporation into chlorinated Si(100) surface},
  author = {T. V. Pavlova},
  year = {2025},
  doi = {10.1063/5.0266110},
  url = {https://arxiv.org/abs/2510.15608},
  note = {Source identifier: 2510.15608}
}