@misc{indiciae8a3dacef0ac0, title = {A Computational Study for Screening High-Selectivity Inhibitors in Area-Selective Atomic Layer Deposition on Amorphous Surfaces}, author = {Gijin Kim and Purun-hanul Kim and Suk Gyu Hahm and Myongjong Kwon and Byungha Park and Changho Hong and Seungwu Han}, year = {2025}, url = {https://arxiv.org/abs/2510.17356}, note = {Source identifier: 2510.17356} }