TY  - RPRT
TI  - A Computational Study for Screening High-Selectivity Inhibitors in Area-Selective Atomic Layer Deposition on Amorphous Surfaces
AU  - Gijin Kim
AU  - Purun-hanul Kim
AU  - Suk Gyu Hahm
AU  - Myongjong Kwon
AU  - Byungha Park
AU  - Changho Hong
AU  - Seungwu Han
PY  - 2025
UR  - https://arxiv.org/abs/2510.17356
ID  - 2510.17356
ER  -