@misc{indiciaef286e263a868,
  title = {Diagnostics of a Multicusp-Assisted Inductively-Coupled Radio-Frequency Plasma Source for Plasma Immersion Ion Implantation},
  author = {Moreno Joel and Jimenez Marilyn and Okerstrom Daniel and Bradley Michael P. and Couëdel Lénaïc},
  year = {2026},
  url = {https://arxiv.org/abs/2510.18384},
  note = {Source identifier: 2510.18384}
}