@misc{indiciae9cce940fa73d,
  title = {Ultra-high-precision fused silica micro-hole machining via spherical aberration-assisted filamentation and laser-induced deep etching},
  author = {Seunghyun Bang and Seonghyeon Kang and Hyunjong Lee and Hyungsik Kim and Seokho Song and Kwang-Geol Lee},
  year = {2025},
  url = {https://arxiv.org/abs/2510.19100},
  note = {Source identifier: 2510.19100}
}