TY  - RPRT
TI  - Ultra-high-precision fused silica micro-hole machining via spherical aberration-assisted filamentation and laser-induced deep etching
AU  - Seunghyun Bang
AU  - Seonghyeon Kang
AU  - Hyunjong Lee
AU  - Hyungsik Kim
AU  - Seokho Song
AU  - Kwang-Geol Lee
PY  - 2025
UR  - https://arxiv.org/abs/2510.19100
ID  - 2510.19100
ER  -