@misc{indiciaeb4403233a673,
  title = {Fabrication and Structural Analysis of Trilayers for Tantalum Josephson Junctions with Ta\$\_2\$O\$\_5\$ Barriers},
  author = {Raahul Potluri and Rohin Tangirala and Jiangteng Liu and Alejandro Barrios and Praveen Kumar and Sage R. Bauers and Peter V. Sushko and David P. Pappas and Serena Eley},
  year = {2026},
  url = {https://arxiv.org/abs/2510.20114},
  note = {Source identifier: 2510.20114}
}