@misc{indiciaec3926daba25f,
  title = {Unsupervised Anomaly Prediction with N-BEATS and Graph Neural Network in Multi-variate Semiconductor Process Time Series},
  author = {Daniel Sorensen and Bappaditya Dey and Minjin Hwang and Sandip Halder},
  year = {2025},
  url = {https://arxiv.org/abs/2510.20718},
  note = {Source identifier: 2510.20718}
}