TY  - RPRT
TI  - Unsupervised Anomaly Prediction with N-BEATS and Graph Neural Network in Multi-variate Semiconductor Process Time Series
AU  - Daniel Sorensen
AU  - Bappaditya Dey
AU  - Minjin Hwang
AU  - Sandip Halder
PY  - 2025
UR  - https://arxiv.org/abs/2510.20718
ID  - 2510.20718
ER  -