TY  - RPRT
TI  - Impact of Oxygen Plasma Surface Treatment on Photoresist Adhesion in BaTiO3-Based Photonic Device Fabrication
AU  - Weiyou Kong
AU  - Weijia Kong
AU  - Lukas Chrostowski
AU  - Xin Xin
PY  - 2025
UR  - https://arxiv.org/abs/2511.00349
ID  - 2511.00349
ER  -