@misc{indiciae73abba661054,
  title = {Directional atomic layer etching of MgO-doped lithium niobate using Br-based plasma},
  author = {Ivy I. Chen and Mariya Ezzy and Emily Hsue-Chi Shi and Clifford F. Frez and Suraj and Lin Yi and Mahmood Bagheri and James R. Renzas and Alireza Marandi and Frank Greer and Austin J. Minnich},
  year = {2025},
  url = {https://arxiv.org/abs/2511.01825},
  note = {Source identifier: 2511.01825}
}