@misc{indiciaeddda6a0f0651,
  title = {Fabrication and characterization of high-Q silicon nitride membrane resonators},
  author = {Atkin D. Hyatt and Oscar A. Flores and Aman R. Agrawal and Charles A. Condos and Dalziel J. Wilson},
  year = {2025},
  doi = {10.3791/68706},
  url = {https://arxiv.org/abs/2511.02166},
  note = {Source identifier: 2511.02166}
}