TY  - RPRT
TI  - Fabrication and characterization of high-Q silicon nitride membrane resonators
AU  - Atkin D. Hyatt
AU  - Oscar A. Flores
AU  - Aman R. Agrawal
AU  - Charles A. Condos
AU  - Dalziel J. Wilson
PY  - 2025
DO  - 10.3791/68706
UR  - https://arxiv.org/abs/2511.02166
ID  - 2511.02166
ER  -