@misc{indiciae1f2967bf2cdc,
  title = {Process-structure-property relationships in subtractive fabrication of silicon nitride microresonators for nonlinear photonics},
  author = {Lala Rukh and Gabriel M. Colación and Franco H. Buck and Tara E. Drake},
  year = {2025},
  url = {https://arxiv.org/abs/2511.02198},
  note = {Source identifier: 2511.02198}
}