TY  - RPRT
TI  - Process-structure-property relationships in subtractive fabrication of silicon nitride microresonators for nonlinear photonics
AU  - Lala Rukh
AU  - Gabriel M. Colación
AU  - Franco H. Buck
AU  - Tara E. Drake
PY  - 2025
UR  - https://arxiv.org/abs/2511.02198
ID  - 2511.02198
ER  -