@misc{indiciae674fc5da9d8b,
  title = {Structural characterization and bonding energy analysis for plasma-activated bonding of SiCN films: A reactive molecular dynamics study},
  author = {Juheon Kim and Minki Jang and Junhyeok Park and Byungjo Kim and Hayoung Chung},
  year = {2025},
  url = {https://arxiv.org/abs/2511.03476},
  note = {Source identifier: 2511.03476}
}