TY  - RPRT
TI  - Structural characterization and bonding energy analysis for plasma-activated bonding of SiCN films: A reactive molecular dynamics study
AU  - Juheon Kim
AU  - Minki Jang
AU  - Junhyeok Park
AU  - Byungjo Kim
AU  - Hayoung Chung
PY  - 2025
UR  - https://arxiv.org/abs/2511.03476
ID  - 2511.03476
ER  -