TY  - RPRT
TI  - Uncertainty quantification and parameter optimization of plasma etching process using heteroscedastic Gaussian process
AU  - Yongsu Jung
AU  - Minji Kang
AU  - Muyoung Kim
AU  - Min Sup Choi
AU  - Hyeong-U Kim
AU  - Jaekwang Kim
PY  - 2025
UR  - https://arxiv.org/abs/2511.04990
ID  - 2511.04990
ER  -