@misc{indiciae556852ad3bf7,
  title = {Sputtered AlN buffer layer for low-loss crystalline AlN-on-sapphire integrated photonics},
  author = {Samuele Brunetta and Samantha Sbarra and Brandon Shuen Yi Loke and Jean-François Carlin and Nicolas Grandjean and Camille-Sophie Brès and Raphaël Butté},
  year = {2025},
  doi = {10.1021/acsphotonics.5c02661},
  url = {https://arxiv.org/abs/2511.05666},
  note = {Source identifier: 2511.05666}
}