@misc{indiciae98e112350af5,
  title = {Unitho: A Unified Multi-Task Framework for Computational Lithography},
  author = {Qian Jin and Yumeng Liu and Yuqi Jiang and Qi Sun and Cheng Zhuo},
  year = {2025},
  url = {https://arxiv.org/abs/2511.10255},
  note = {Source identifier: 2511.10255}
}