TY  - RPRT
TI  - Unitho: A Unified Multi-Task Framework for Computational Lithography
AU  - Qian Jin
AU  - Yumeng Liu
AU  - Yuqi Jiang
AU  - Qi Sun
AU  - Cheng Zhuo
PY  - 2025
UR  - https://arxiv.org/abs/2511.10255
ID  - 2511.10255
ER  -