@misc{indiciae17465fa2c21d, title = {In-vacuum surface flashover of SiN, AlN, and etched SiO2 thin films at micrometre scales}, author = {Vijay Kumar and Martin Siegele-Brown and Matthew Aylett and Sebastian Weidt and Winfried Karl Hensinger}, year = {2025}, url = {https://arxiv.org/abs/2511.10528}, note = {Source identifier: 2511.10528} }