TY - RPRT TI - In-vacuum surface flashover of SiN, AlN, and etched SiO2 thin films at micrometre scales AU - Vijay Kumar AU - Martin Siegele-Brown AU - Matthew Aylett AU - Sebastian Weidt AU - Winfried Karl Hensinger PY - 2025 UR - https://arxiv.org/abs/2511.10528 ID - 2511.10528 ER -