@misc{indiciaebfaf71dbacfc, title = {STEM EBIC as a Quantitative Probe of Semiconductor Devices}, author = {Sebastian Schneider and Sebastian Beckert and René Hammer and Markus König and Grigore Moldovan and Darius Pohl}, year = {2025}, url = {https://arxiv.org/abs/2511.11528}, note = {Source identifier: 2511.11528} }