@misc{indiciae6e46a0038391,
  title = {LithoSeg: A Coarse-to-Fine Framework for High-Precision Lithography Segmentation},
  author = {Xinyu He and Botong Zhao and Bingbing Li and Shujing Lyu and Jiwei Shen and Yue Lu},
  year = {2025},
  url = {https://arxiv.org/abs/2511.12005},
  note = {Source identifier: 2511.12005}
}