TY  - RPRT
TI  - LithoSeg: A Coarse-to-Fine Framework for High-Precision Lithography Segmentation
AU  - Xinyu He
AU  - Botong Zhao
AU  - Bingbing Li
AU  - Shujing Lyu
AU  - Jiwei Shen
AU  - Yue Lu
PY  - 2025
UR  - https://arxiv.org/abs/2511.12005
ID  - 2511.12005
ER  -