@misc{indiciae57d4fb5cbfbf,
  title = {Low-to-mid Al content (\$x\textbackslash{}sim\$ 0-0.56) Al\$\_x\$In\$\_\{1-x\}\$N layers deposited on Si(100) by radio-frequency sputtering},
  author = {R. Blasco and S. Valdueza-Felip and D. Montero and M. Sun and J. Olea and F. B. Naranjo},
  year = {2025},
  doi = {10.1002/pssb.201900575},
  url = {https://arxiv.org/abs/2511.17039},
  note = {Source identifier: 2511.17039}
}