@misc{indiciae18c3895b61c0,
  title = {Residual Stress Anisotropy In Thin-Film Lithium Niobate For Stress-Managed MEMS},
  author = {Byeongjin Kim and Ian Anderson and Tzu-Hsuan Hsu and Ziqian Yao and Mihir Chaudhari and Sinwoo Cho and Ruochen Lu},
  year = {2025},
  doi = {10.1109/mems64181.2026.11419544},
  url = {https://arxiv.org/abs/2511.17474},
  note = {Source identifier: 2511.17474}
}