@misc{indiciae1e2e0a441f87,
  title = {Tuning Breakdown-to-Coercive Field Ratio in Ultra-Thin Al1-xScxN Films via Reactive Nitrogen Atmosphere},
  author = {Yinuo Zhang and Walter J. Smith and Giovanni Esteves and Eric A. Stach and Thomas E. Beechem and Roy H. Olsson III},
  year = {2025},
  url = {https://arxiv.org/abs/2511.18160},
  note = {Source identifier: 2511.18160}
}