TY  - RPRT
TI  - Tuning Breakdown-to-Coercive Field Ratio in Ultra-Thin Al1-xScxN Films via Reactive Nitrogen Atmosphere
AU  - Yinuo Zhang
AU  - Walter J. Smith
AU  - Giovanni Esteves
AU  - Eric A. Stach
AU  - Thomas E. Beechem
AU  - Roy H. Olsson III
PY  - 2025
UR  - https://arxiv.org/abs/2511.18160
ID  - 2511.18160
ER  -