@misc{indiciaeb9ff3cdcc2b6, title = {Micro-Electro-Mechanical System Vapor Cells With Passivated Internal Cavities}, author = {Rajesh Pandiyan and Sanyasi Bobbara and Somayeh Mirzaee and Su-Peng Yu and Ruoxi Wang and Adam Sibenik and Reza Kohandani and James P. Shaffer}, year = {2025}, url = {https://arxiv.org/abs/2512.00245}, note = {Source identifier: 2512.00245} }