TY  - RPRT
TI  - Micro-Electro-Mechanical System Vapor Cells With Passivated Internal Cavities
AU  - Rajesh Pandiyan
AU  - Sanyasi Bobbara
AU  - Somayeh Mirzaee
AU  - Su-Peng Yu
AU  - Ruoxi Wang
AU  - Adam Sibenik
AU  - Reza Kohandani
AU  - James P. Shaffer
PY  - 2025
UR  - https://arxiv.org/abs/2512.00245
ID  - 2512.00245
ER  -