@misc{indiciaec16ecb9fb2f1,
  title = {Chemical Vapor Deposition of Nitrides by Carbon-free Brominated Precursors},
  author = {Stefano Leone and Teresa Duarte and Hanspeter Menner and Jannik Richter and Lutz Kirste and Sven Maegdefessel and Felix Hoffmann and Byeongchan So and Ruediger Quay},
  year = {2025},
  doi = {10.1002/pssa.202600005},
  url = {https://arxiv.org/abs/2512.06566},
  note = {Source identifier: 2512.06566}
}