@misc{indiciaeaf8b55baca46, title = {Hidden Structural Variants in ALD NbN Superconducting Trilayers Revealed by Atomistic Analysis}, author = {Prachi Garg and Danqing Wang and Hong X. Tang and Baishakhi Mazumder}, year = {2025}, url = {https://arxiv.org/abs/2512.07095}, note = {Source identifier: 2512.07095} }