TY - RPRT TI - Hidden Structural Variants in ALD NbN Superconducting Trilayers Revealed by Atomistic Analysis AU - Prachi Garg AU - Danqing Wang AU - Hong X. Tang AU - Baishakhi Mazumder PY - 2025 UR - https://arxiv.org/abs/2512.07095 ID - 2512.07095 ER -