@misc{indiciaeb784996cb2c6,
  title = {Single-step laser patterning and thinning of biocompatible MEMS flow sensor},
  author = {Mohammad Nizar Mohamed Zukri and Muhammad Salman Al Farisi and Yoshihiro Hasegawa and Mitsuhiro Shikida},
  year = {2025},
  url = {https://arxiv.org/abs/2512.08128},
  note = {Source identifier: 2512.08128}
}