TY  - RPRT
TI  - Single-step laser patterning and thinning of biocompatible MEMS flow sensor
AU  - Mohammad Nizar Mohamed Zukri
AU  - Muhammad Salman Al Farisi
AU  - Yoshihiro Hasegawa
AU  - Mitsuhiro Shikida
PY  - 2025
UR  - https://arxiv.org/abs/2512.08128
ID  - 2512.08128
ER  -