TY  - RPRT
TI  - A Physics-Constrained, Design-Driven Methodology for Defect Dataset Generation in Optical Lithography
AU  - Yuehua Hu
AU  - Jiyeong Kong
AU  - Dong-yeol Shin
AU  - Jaekyun Kim
AU  - Kyung-Tae Kang
PY  - 2025
UR  - https://arxiv.org/abs/2512.09001
ID  - 2512.09001
ER  -