@misc{indiciae8d19db95e21b, title = {Beta-Ga2O3 Sub-Micron FinFETs with Si Delta-Doped Channel Modulating Charge Density Above 3x10\textasciicircum{}13 cm\textasciicircum{}-2}, author = {Nabasindhu Das and Cameron Gorsak and Ankita Kashyap and Advait Gilankar and Pushpanshu Tripathi and Salil A Paranjape and Trevor Thornton and Hari Nair and Nidhin Kurian Kalarickal}, year = {2025}, url = {https://arxiv.org/abs/2512.09279}, note = {Source identifier: 2512.09279} }