@misc{indiciae9cd4704828cb,
  title = {Epitaxial Recovery of beta-Ga2O3 after High Dose Implantation},
  author = {Tianhai Luo and Katie R. Gann and Cameron A. Gorsak and Hari P. Nair and R. B. van Dover and Michal O. Thompson},
  year = {2025},
  url = {https://arxiv.org/abs/2512.12148},
  note = {Source identifier: 2512.12148}
}