@misc{indiciae9c59923f778d,
  title = {Hybrid electrostatic-piezo MEMS photonic integrated modulators},
  author = {Thuy-Linh Le and Hardit Singh and Julia M. Boyle and Matthew Zimmermann and Andrew J. Leenheer and Daniel Dominguez and Matt Eichenfield and Mark Dong},
  year = {2025},
  doi = {10.1063/5.0316551},
  url = {https://arxiv.org/abs/2512.12383},
  note = {Source identifier: 2512.12383}
}