@misc{indiciae8621c89e8d67,
  title = {Mechanisms of inductively coupled BCl3-plasma interaction with the GaN surfaceMechanisms of inductively coupled BCl3-plasma interaction with the GaN surface},
  author = {Anton Kobelev and Nikolay Andrianov and Yuri Barsukov and Alexander Smirnov},
  year = {2025},
  url = {https://arxiv.org/abs/2512.12569},
  note = {Source identifier: 2512.12569}
}