TY  - RPRT
TI  - Mechanisms of inductively coupled BCl3-plasma interaction with the GaN surfaceMechanisms of inductively coupled BCl3-plasma interaction with the GaN surface
AU  - Anton Kobelev
AU  - Nikolay Andrianov
AU  - Yuri Barsukov
AU  - Alexander Smirnov
PY  - 2025
UR  - https://arxiv.org/abs/2512.12569
ID  - 2512.12569
ER  -