@misc{indiciae2789de41bb56,
  title = {3D lattice Monte Carlo modeling of morphology formation of Si/SiOx nanocomposites during phase separation of nonstoichiometric Si oxide films},
  author = {Ivan Oliinyk and Andrey Sarikov},
  year = {2025},
  doi = {10.1109/elnano63396.2026.11601638},
  url = {https://arxiv.org/abs/2512.13071},
  note = {Source identifier: 2512.13071}
}