TY  - RPRT
TI  - 3D lattice Monte Carlo modeling of morphology formation of Si/SiOx nanocomposites during phase separation of nonstoichiometric Si oxide films
AU  - Ivan Oliinyk
AU  - Andrey Sarikov
PY  - 2025
DO  - 10.1109/elnano63396.2026.11601638
UR  - https://arxiv.org/abs/2512.13071
ID  - 2512.13071
ER  -