TY  - RPRT
TI  - Fabrication Optimization of Suspended Stencil Mask Lithography for Multi-Terminal Josephson Junctions
AU  - Justus Teller
AU  - Abdur Rehman Jalil
AU  - Florian Lentz
AU  - Detlev Grützmacher
AU  - Thomas Schäpers
PY  - 2025
DO  - 10.1116/6.0005295
UR  - https://arxiv.org/abs/2512.16690
ID  - 2512.16690
ER  -