@misc{indiciaea82577b679ca, title = {Low-loss frequency-tunable Josephson junction array cavities on Ge/SiGe heterostructures with a tapered etching approach}, author = {Franco De Palma and Elena Acinapura and Wonjin Jang and Fabian Oppliger and Radha Krishnan and Arianna Nigro and Ilaria Zardo and Pasquale Scarlino}, year = {2025}, url = {https://arxiv.org/abs/2512.17812}, note = {Source identifier: 2512.17812} }