TY - RPRT TI - Low-loss frequency-tunable Josephson junction array cavities on Ge/SiGe heterostructures with a tapered etching approach AU - Franco De Palma AU - Elena Acinapura AU - Wonjin Jang AU - Fabian Oppliger AU - Radha Krishnan AU - Arianna Nigro AU - Ilaria Zardo AU - Pasquale Scarlino PY - 2025 UR - https://arxiv.org/abs/2512.17812 ID - 2512.17812 ER -