@misc{indiciae6f2ab173ba6c,
  title = {Feedforward Compensation of Piezo Nonlinearity for High-Precision High-Speed Atomic Force Microscopy},
  author = {Kenichi Umeda and Noriyuki Kodera},
  year = {2026},
  url = {https://arxiv.org/abs/2512.18252},
  note = {Source identifier: 2512.18252}
}