TY  - RPRT
TI  - Feedforward Compensation of Piezo Nonlinearity for High-Precision High-Speed Atomic Force Microscopy
AU  - Kenichi Umeda
AU  - Noriyuki Kodera
PY  - 2026
UR  - https://arxiv.org/abs/2512.18252
ID  - 2512.18252
ER  -